The laboratory has about 30 million RMB in instruments and scientific software, with essential capabilities for numerical simulation, new material development, thin-film and nanofabrication processes, device preparation, and characterizations. Combined with the CAS Key Lab of Low-Carbon Conversion Science and Engineering, and the public R&D platforms such as the Quantum Device Center and the Soft Nano Platform of ShanghaiTech, we can complete most of the material, process and device R&D.
PECVD
Thermal/E-beam Evaporator
DC/RF sputter
DC/RF sputter
Thermal ALD *2
Gas Room
Nanoimpritor
Wet bench
Glove Box
Tube Furnace
3D confocal microscope
Fiber Optic Spectrometer
High Temerature DC/RF sputter
Rapid Thermal Process
Slot Die Coater
Tube Furnace with Plasma Source
Thermal Conductivity Analyzer
Linseis LSR-Platform
Electrochemical Workstation
Integrated AFM-Raman System
Semiconductor Parameter Analyzer & Probe Station
Optical Microscope
Quantum Efficiency Measurement System
Solar Simulator
ShanghaiTech Soft Matter Nanofabrication laboratory (SMN): https://eshare.shanghaitech.edu.cn/spst/rnm/
